Title:
【考案の名称】遠心式基板乾燥装置の基板クランプ装置
Document Type and Number:
Japanese Patent JPH0744016
Kind Code:
Y2
Inventors:
Kenji Sugimoto
Koichiro Hashimoto
Koichiro Hashimoto
Application Number:
JP6824890U
Publication Date:
October 09, 1995
Filing Date:
June 26, 1990
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/677; H01L21/304; H01L21/68; (IPC1-7): H01L21/304; H01L21/68
Domestic Patent References:
| JP62177036U |
Attorney, Agent or Firm:
Juichi Chatan
Next Patent: 自動車用傘収納袋