Title:
【発明の名称】走査型電子顕微鏡用断面試料ホルダー
Document Type and Number:
Japanese Patent JPH0760662
Kind Code:
B2
Inventors:
Takao Yasue
Application Number:
JP8450888A
Publication Date:
June 28, 1995
Filing Date:
April 05, 1988
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01J37/20; (IPC1-7): H01J37/20
Domestic Patent References:
| JP57112457U | ||||
| JP61156171U |
Attorney, Agent or Firm:
Fukami Hisaro (3 outside)
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