Title:
【発明の名称】個別空調方法及び個別空調用チャンバー装置
Document Type and Number:
Japanese Patent JPH0796963
Kind Code:
B2
Inventors:
Takamitsu Sato
Application Number:
JP1293491A
Publication Date:
October 18, 1995
Filing Date:
January 10, 1991
Export Citation:
Assignee:
Fujita Co., Ltd.
International Classes:
F24F11/76; F24F13/32; (IPC1-7): F24F13/32; F24F11/053
Attorney, Agent or Firm:
Katsuji Maki
Next Patent: ADHESIVE SHEET