Title:
【発明の名称】干渉計測装置
Document Type and Number:
Japanese Patent JPH10500767
Kind Code:
A
Abstract:
An improved interferometric measuring system wherein the system projects a first beam of light at a first measurement wavelength along a reference path to a reference reflector and a second beam of light at a second measurement wavelength along a measurement path to a measurement reflector, and determines a change in position of the measurement reflector from an interference pattern produced between a first light beam reflected from the reference reflector and a second light beam reflected from the measurement reflector, and wherein the system can measure atmospheric disturbances along the measurement path, concurrently with measuring a change in the position of the measurement reflector.
Inventors:
Squirrel Stephen A.
Henschau Philip Dee.
Henschau Philip Dee.
Application Number:
JP51918995A
Publication Date:
January 20, 1998
Filing Date:
January 13, 1995
Export Citation:
Assignee:
Spatter ink.
International Classes:
G01B9/02; G01B11/00; (IPC1-7): G01B9/02; G01B11/00
Attorney, Agent or Firm:
Ishida Kiki