Document Type and Number:
Japanese Patent JPS4831512
Kind Code:
B1
Application Number:
JP5930069A
Publication Date:
September 29, 1973
Filing Date:
July 25, 1969
Export Citation:
International Classes:
H01L29/73; H01L21/314; H01L21/322; H01L21/331; H01L23/31; H01L29/74; H01L29/861