Document Type and Number:
Japanese Patent JPS50140213
Kind Code:
A
Application Number:
JP4763674A
Publication Date:
November 10, 1975
Filing Date:
April 30, 1974
Export Citation:
International Classes:
H01J29/45; H01L31/00; H01L31/10; (IPC1-7): H01J29/45; H01L31/00