Document Type and Number:
Japanese Patent JPS50154067
Kind Code:
A
Application Number:
JP6203274A
Publication Date:
December 11, 1975
Filing Date:
May 31, 1974
Export Citation:
International Classes:
H01L21/302; C23F1/00; C23F4/00; H01L21/00; H01L21/3065; (IPC1-7): C23C15/00; C23F1/00; H01L21/00
Domestic Patent References:
| JPS4931716A | 1974-03-22 | |||
| JP46041852A |