Document Type and Number:
Japanese Patent JPS5027773
Kind Code:
U
Application Number:
JP8126273U
Publication Date:
March 31, 1975
Filing Date:
July 09, 1973
Export Citation:
International Classes:
H01L21/822; H01L21/283; H01L21/331; H01L23/48; H01L27/04; H01L29/06; H01L29/417; H01L29/73; (IPC1-7): H01L29/06; H01L21/283