Document Type and Number:
Japanese Patent JPS5084036
Kind Code:
U
Application Number:
JP13759273U
Publication Date:
July 18, 1975
Filing Date:
November 28, 1973
Export Citation:
International Classes:
G03G5/08; G03G5/00; G03G5/04; H01L31/08; (IPC1-7): G03G5/00; G03G5/04; H01L31/08