Document Type and Number:
Japanese Patent JPS5176985
Kind Code:
A
Inventors:
TOKUMARU SEIYA
SHINOZAKI SATOSHI
NISHI YOSHIO
NAKAI MASANORI
NAKAMURA JUNICHI
ITO SHINTARO
SHINOZAKI SATOSHI
NISHI YOSHIO
NAKAI MASANORI
NAKAMURA JUNICHI
ITO SHINTARO
Application Number:
JP14879574A
Publication Date:
July 03, 1976
Filing Date:
December 27, 1974
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L27/082; H01L21/331; H01L21/8226; H01L29/73; H03K19/08; (IPC1-7): H01L21/72; H03K19/08
Domestic Patent References:
JPS50134386A | 1975-10-24 | |||
JPS5157170A | 1976-05-19 |