Document Type and Number:
Japanese Patent JPS5314673
Kind Code:
U
Application Number:
JP9640276U
Publication Date:
February 07, 1978
Filing Date:
July 16, 1976
Export Citation:
International Classes:
F23Q3/00; H01L41/00; H01L41/08; H01L41/113; H02N2/00; H02N2/18; (IPC1-7): F23Q3/00; H01L41/00
Domestic Patent References:
| JPS50126569U | 1975-10-17 |
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