Document Type and Number:
Japanese Patent JPS5334331
Kind Code:
Y2
Application Number:
JP4686673U
Publication Date:
August 23, 1978
Filing Date:
April 19, 1973
Export Citation:
International Classes:
H01L21/673; C23C14/24; C23C14/26; H01L21/02; (IPC1-7): C23C13/12