Document Type and Number:
Japanese Patent JPS5344376
Kind Code:
Y2
Application Number:
JP751874U
Publication Date:
October 24, 1978
Filing Date:
January 14, 1974
Export Citation:
International Classes:
G01R31/26; G01R31/18; H01L21/66; H01L33/56; H01L33/62; H05K13/02; (IPC1-7): H01L21/66; G01R31/26; H01L33/00