Document Type and Number:
Japanese Patent JPS5389161
Kind Code:
U
Application Number:
JP17105776U
Publication Date:
July 21, 1978
Filing Date:
December 21, 1976
Export Citation:
International Classes:
H01L21/673; H01L21/22; H01L21/223; H01L21/31; H01L21/316; H01L21/68; (IPC1-7): H01L21/223; H01L21/316; H01L21/68
Domestic Patent References:
JPS4884570A | 1973-11-09 | |||
JPS5081160A | 1975-07-01 | |||
JP50081160B |