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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5389161
Kind Code:
U
Application Number:
JP17105776U
Publication Date:
July 21, 1978
Filing Date:
December 21, 1976
Export Citation:
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International Classes:
H01L21/673; H01L21/22; H01L21/223; H01L21/31; H01L21/316; H01L21/68; (IPC1-7): H01L21/223; H01L21/316; H01L21/68
Domestic Patent References:
JPS4884570A1973-11-09
JPS5081160A1975-07-01
JP50081160B



 
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