Document Type and Number:
Japanese Patent JPS5389165
Kind Code:
U
Application Number:
JP17120876U
Publication Date:
July 21, 1978
Filing Date:
December 20, 1976
Export Citation:
International Classes:
H01L23/48; H01L21/58; H01L21/68; (IPC1-7): H01L21/58; H01L21/68