Document Type and Number:
Japanese Patent JPS5478475
Kind Code:
U
Application Number:
JP15288377U
Publication Date:
June 04, 1979
Filing Date:
November 14, 1977
Export Citation:
International Classes:
F25D1/00; H01L23/46; H01L23/467; (IPC1-7): H01L23/46; F25D1/00