Document Type and Number:
Japanese Patent JPS55162767
Kind Code:
U
Application Number:
JP6312079U
Publication Date:
November 21, 1980
Filing Date:
May 11, 1979
Export Citation:
International Classes:
F23Q3/00; H01L41/08; H01L41/113; H02N2/00; (IPC1-7): F23Q3/00; H01L41/08