Document Type and Number:
Japanese Patent JPS556285
Kind Code:
B2
Application Number:
JP2489172A
Publication Date:
February 15, 1980
Filing Date:
March 09, 1972
Export Citation:
International Classes:
C30B25/02; C23C16/44; C30B29/06; C30B29/08; H01L21/205; H01L21/329
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