Document Type and Number:
Japanese Patent JPS5646258
Kind Code:
B2
Application Number:
JP9878577A
Publication Date:
October 31, 1981
Filing Date:
August 19, 1977
Export Citation:
International Classes:
G03F7/038; G03C5/08; G03F7/039; G03F7/09; G03F7/20; H01L21/027; H01L21/302