Document Type and Number:
Japanese Patent JPS5787535
Kind Code:
U
Application Number:
JP16453380U
Publication Date:
May 29, 1982
Filing Date:
November 17, 1980
Export Citation:
International Classes:
B23Q3/08; H01L21/58; H01L21/68; (IPC1-7): H01L21/68; B23Q3/08; H01L21/58