Title:
【考案の名称】カ-ブトレ-サ
Document Type and Number:
Japanese Patent JPS58165682
Kind Code:
U
Inventors:
Oishi Hideo
Application Number:
JP6356582U
Publication Date:
November 04, 1983
Filing Date:
April 30, 1982
Export Citation:
International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66