PURPOSE: To improve flatness accuracy, positioning controllability, attachability and detachability, etc., by sticking reticles to a thin plate, and fixing the thin plate to a metallic frame.

CONSTITUTION: Reticles 1 are stuck to a thin plate 3 with a both side adhesive tape 2, and the plate 3 is fixed to a metallic frame 4 with screws. Sticking and screwing are executed by observing the reticles and register marks through a microscope. Since the recticles 1 are indirectly fixed through the frame 4 and the plate 3, the flatness accuracy of the frame 4 does not affects the recticle 1. The reticles 1 can be detached with the screws 5 easily, and the positioning can be easily ontrolled. This method is especially suitable for the automatic recticle exchanger of a contraction exposure device.