PURPOSE: To enable the control of the AC power applied between a dielectric electrode and an anode and between the dielectric electrode and a cathode, by inserting an inductance in the cathode circuit of AC discharge or the anode circuit.
CONSTITUTION: An inductance 14 which restricts the AC discharge between a dielectric electrode 6 and a cathode 2 and increase the applied power of AC between the dielectric electrode 6 and an anode 1 and the part 15 of AC discharge which is performed mainly between a dielectric electrode 8 and the anode 1 are equipped. AC discharge 15 are performed between the cathode 2 and the dielectric electrode 6 and between the anode 1 and the dielectric electrode 6 by impressing the voltage of an AC high voltage power source 9. The inductance 14 is equivalent to short for DC but functions as a resistance element for AC, and the value thereof is proportional to the frequency. Therefore, the AC discharge between the cathode 2 and the dielectric electrode 6 becomes difficult to generate by the resistance effect of the inductance, and the AC discharge is performed mainly between the anode 1 and the dielectric electrode 6.
TANAKA MASAAKI
HISHII MASAO
