Title:
【考案の名称】クリ-ンオ-ブン
Document Type and Number:
Japanese Patent JPS5853134
Kind Code:
U
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Inventors:
Suzuki Shigemi
Masaaki Ito
Obata Osamu
Masaaki Ito
Obata Osamu
Application Number:
JP14864581U
Publication Date:
April 11, 1983
Filing Date:
October 05, 1981
Export Citation:
International Classes:
F24F7/06; F26B9/06; H01L21/02; H01L21/027; (IPC1-7): H01L21/02; F26B9/06