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Title:
【考案の名称】表面検査装置
Document Type and Number:
Japanese Patent JPS5899654
Kind Code:
U
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Inventors:
Kenichi Kobayashi
Shogo Matsui
Application Number:
JP19648581U
Publication Date:
July 06, 1983
Filing Date:
December 26, 1981
Export Citation:
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International Classes:
G01N21/84; G01N21/88; (IPC1-7): G01N21/88
Domestic Patent References:
JPS5494145A1979-07-25
JPS5684535A1981-07-09



 
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