Title:
【考案の名称】研磨装置
Document Type and Number:
Japanese Patent JPS59112551
Kind Code:
U
Inventors:
Masahiko Yasui
Application Number:
JP589583U
Publication Date:
July 30, 1984
Filing Date:
January 18, 1983
Export Citation:
International Classes:
B24B23/02; B24B23/00; B24B23/08; B24B29/00; (IPC1-7): B24B23/00; B24B29/00