Title:
【考案の名称】搬送路に高低差を有する処理装置間での電子部品製造用薄板物のエレベータ
Document Type and Number:
Japanese Patent JPS59170517
Kind Code:
U
Abstract:
An apparatus for transferring a sheet-like article such as a wafer between a first horizontal passage defining a first plane and a second horizontal passage defining a second plane at a different level from said first plane comprising a carriage vertically movable between said first and second planes for transferring said sheet-like article between said first and second horizontal passages.
Inventors:
Mori Kyosho
Application Number:
JP6589183U
Publication Date:
November 14, 1984
Filing Date:
April 30, 1983
Export Citation:
International Classes:
B65G15/14; B65G47/52; B65G47/57; H05K13/02; B65G47/64; B65G49/06; B65H5/02; B65H5/04; (IPC1-7): B65G47/57; H05K3/00
Domestic Patent References:
| JPS4016588Y1 | ||||
| JPS5622764A | 1981-03-03 | |||
| JPS499888U | 1974-01-28 |
Previous Patent: JPS59170516
Next Patent: WITHDRAWAL PREVENTION OF SCREW FROM WASHER AND WIRE PRESS PLATE
Next Patent: WITHDRAWAL PREVENTION OF SCREW FROM WASHER AND WIRE PRESS PLATE