Title:
【考案の名称】吸着固定装置
Document Type and Number:
Japanese Patent JPS59183735
Kind Code:
U
Inventors:
Takashi Ono
Application Number:
JP7809283U
Publication Date:
December 07, 1984
Filing Date:
May 23, 1983
Export Citation:
International Classes:
B23Q3/08; B28D5/00; H01L21/68; H01L21/683; (IPC1-7): B23Q3/08; B28D5/00; H01L21/68
Domestic Patent References:
| JPS5374374A | 1978-07-01 |