Title:
【発明の名称】電子ビ-ム露光装置
Document Type and Number:
Japanese Patent JPS5923102
Kind Code:
B2
Inventors:
NAKAYAMA NORIAKI
IGAKI SEIGO
OKABE MASAHIRO
FURUKAWA YASUO
INAGAKI JUSHI
IGAKI SEIGO
OKABE MASAHIRO
FURUKAWA YASUO
INAGAKI JUSHI
Application Number:
JP15155577A
Publication Date:
May 30, 1984
Filing Date:
December 16, 1977
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/027; H01L21/26; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Kugoro Tamamushi