Title:
【発明の名称】圧電素子の研磨状態検出装置
Document Type and Number:
Japanese Patent JPS5926127
Kind Code:
B2
Inventors:
MORYA NAKANOBU
Application Number:
JP8786976A
Publication Date:
June 25, 1984
Filing Date:
July 23, 1976
Export Citation:
Assignee:
SEIKOSHA KK
International Classes:
B23Q17/09; B24B37/013; B24B49/00; G02B5/30; H01L41/22; H03H3/02; H03H3/04; (IPC1-7): H03H3/02; B23Q17/00; B24B49/00
Attorney, Agent or Firm:
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