Title:
【考案の名称】高速プロ-バテスト装置
Document Type and Number:
Japanese Patent JPS5934997
Kind Code:
Y2
Inventors:
Kazuhiko Nakatsu
Application Number:
JP3013179U
Publication Date:
September 27, 1984
Filing Date:
March 09, 1979
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01R31/26; G01R1/067; G01R1/073; H01L21/66; (IPC1-7): H01L21/66; G01R1/067
Attorney, Agent or Firm:
Koshiro Matsuoka