PURPOSE: To obtain a highly humidity sensitive element having a high accuracy with a uniform characterisic by employing a high molecular charge-transfer complex made up of a specified high molecular electron donor and an electron acceptor as humidity sensitive material.
CONSTITUTION: A high molecular electron donor as a single polymer or a copolymer with less than 25mol% of (meta) acylid acid ester or the like having repetition units represented by the formula I or II (R is H or CH3, (n) 0W3 and X S or Se) and an inorganic electron acceptor such as I2 and SbCl5 or an organic one such as o-chloroanyl and p benzoquinone are dissolved in a solution of toluene and toluchlorobenzene arranged at the ratio of 1:1 and applied on an Al ceramic substrate 2 having a pair of comb-shaped electrode 1 to form a humidity sensitive film 3. Thus. a humidity sensitive element is obtained. In addition, an appropriate amount of inorganic fine powder such as TiO2 is dispersed into the film 3 to further heighten the sensitivity. This produces a highly sensitive humidity element with a better linearity particularly in the region of 40W80% in the relative humidity.
SAKAMOTO MASANORI