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Title:
【考案の名称】分子線結晶成長装置
Document Type and Number:
Japanese Patent JPS60132470
Kind Code:
U
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Inventors:
Junji Saito
Cold water Saju
Application Number:
JP1995484U
Publication Date:
September 04, 1985
Filing Date:
February 15, 1984
Export Citation:
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International Classes:
C30B23/08; C30B25/08; H01L21/203; (IPC1-7): C30B25/08
Domestic Patent References:
JPS5640658U1981-04-15



 
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