【発明の名称】欠陥パタ-ン修正装置

Title:

【発明の名称】欠陥パタ-ン修正装置

Document Type and Number:

Japanese Patent JPS6037462

Kind Code:

B2

Inventors:

NAKAJIMA MASAHITO
FUJIWARA KATSUMI
INAGAKI JUSHI

Application Number:

JP10409776A

Publication Date:

August 26, 1985

Filing Date:

August 31, 1976

Export Citation:

Assignee:

FUJITSU LTD

International Classes:

H05K3/00; G03F1/00; G03F1/72; H01L21/027; H01L21/30; H05K3/22; (IPC1-7): G03F1/00; H01L21/30; H05K3/00

Attorney, Agent or Firm:

Kugoro Tamamushi

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