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Title:
【発明の名称】ポリイミド系樹脂にスルーホール形成用のエツチング液
Document Type and Number:
Japanese Patent JPS6054980
Kind Code:
B2
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Inventors:
SUZUKI HIROSHI
MAKINO DAISUKE
SAIKI ATSUSHI
HARADA YUKYOSHI
Application Number:
JP14168180A
Publication Date:
December 03, 1985
Filing Date:
October 08, 1980
Export Citation:
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Assignee:
HITACHI KASEI KOGYO KK
HITACHI SEISAKUSHO KK
International Classes:
G03F7/00; C08J7/02; C08J7/12; G03F7/30; H01L21/308; (IPC1-7): C08J7/02; C08J7/12; G03F7/00; H01L21/306
Attorney, Agent or Firm:
Kunihiko Wakabayashi



 
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