Document Type and Number:
Japanese Patent JPS63127849
Kind Code:
U
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Application Number:
JP2034187U
Publication Date:
August 22, 1988
Filing Date:
February 13, 1987
Export Citation:
International Classes:
B23Q7/00; B65G47/14; H01L21/68; H05K13/02; (IPC1-7): B23Q7/00; B65G47/14; H01L21/68; H05K13/02