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Document Type and Number:
Japanese Patent JPS6322070
Kind Code:
B2
Abstract:
A semiconductor device has a diffused layer of a first conductivity type which extends to a buried layer of a second conductivity type, formed in a manner to extend from a part of a surface of a semiconductor layer of the second conductivity type which is epitaxially grown on a semiconductor substrate of the first conductivity type through the buried layer of the second conductivity type. A semiconductor junction capacitance is formed of the diffused layer of the first conductivity type and the buried layer of the second conductivity type, and the concentration of an impurity to be introduced into the buried layer of the second conductivity type is controlled.

Inventors:
ISHIBASHI SHUZO
OGURA SADAO
KITAMURA YUKINORI
Application Number:
JP15292579A
Publication Date:
May 10, 1988
Filing Date:
November 28, 1979
Export Citation:
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Assignee:
HITACHI SEISAKUSHO KK
HITACHI TOKYO EREKUTORONIKUSU KK
International Classes:
H01L27/04; H01L21/22; H01L21/331; H01L21/74; H01L21/822; H01L21/8222; H01L27/02; H01L27/06; H01L27/08; H01L29/73; H01L29/93



 
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