Title:
【発明の名称】加速度計の保証質量境界面
Document Type and Number:
Japanese Patent JPS63503090
Kind Code:
A
Abstract:
An accelerometer with improved resistance to errors due to thermal stress. The accelerometer comprises a proof mass assembly (44), a stator (40), and an interface member (90) that includes a plate-like body positioned between the proof mass assembly and the stator. The proof mass assembly includes a reed (72) suspended from a support (70), and a reed capacitor plate positioned on the reed. The body includes a body capacitor plate (94) positioned to form a capacitor with the reed capacitor plate. The interface member includes first mounting member (110) for securely mounting a first area of the stator with respect to a corresponding first area of the support, and a mounting element (126) extending between a second area of the stator and a corresponding second area of the support. The mounting element is relatively compliant along a first axis, and relatively rigid along all other axes. The first axis lies in the plane of the body and passes approximately through the first mounting member.
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Inventors:
Norring, Brian El
Application Number:
JP50259787A
Publication Date:
November 10, 1988
Filing Date:
April 15, 1987
Export Citation:
Assignee:
McGoogan, Douglas Campbell
International Classes:
G01P1/00; G01P15/13; H01L21/336; H01L27/115; (IPC1-7): G01P15/13
Attorney, Agent or Firm:
Mitsuteru Soga (3 outside)