光の回折方法および回折装置、これらに用いる回折格子、ならびに位置エンコーダ装置 - Independent administrative institution National Institute for Materials Science

Title:

光の回折方法および回折装置、これらに用いる回折格子、ならびに位置エンコーダ装置

Document Type and Number:

Japanese Patent JPWO2005003823

Kind Code:

A

Inventors:

Miyazaki Hideki
Hiroshi Miyazaki
Kenjiro Miyano

Application Number:

JP2004009342W

Publication Date:

January 13, 2005

Filing Date:

July 01, 2004

Export Citation:

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Assignee:

Independent administrative institution National Institute for Materials Science
Independent administrative institution Japan Science and Technology Agency

International Classes:

G01J3/24; G01D5/38; G02B26/00; G02B5/18

Attorney, Agent or Firm:

Koichi Kamata
Shigeru Kuroda

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