Title:
半導体デバイス
Document Type and Number:
Japanese Patent JPWO2008075625
Kind Code:
A
Inventors:
Yoshiaki Kitamura
Hidehiro Yoshida
Hisao Nagai
Hidehiro Yoshida
Hisao Nagai
Application Number:
JP2007074133W
Publication Date:
June 26, 2008
Filing Date:
December 14, 2007
Export Citation:
Assignee:
Panasonic incorporated company
International Classes:
H01L51/05; H01L21/336; H01L27/088; H01L51/50; H01L29/786; H01L27/08; H01L21/8234
Attorney, Agent or Firm:
Koichi Washida