Title:
半導体検査装置および半導体検査方法
Document Type and Number:
Japanese Patent JPWO2009151118
Kind Code:
A
Inventors:
Nakagawa 源洋
KAMEDA Yoshio
Katsumi Maeda
Mountain path Shintaro
Murakami Asao
Hideya Murai
Woods Kentaro
Masayuki Mizuno
Takko Masaki
Kikuchi 克
Koichiro Noguchi
Koichi Nose
KAMEDA Yoshio
Katsumi Maeda
Mountain path Shintaro
Murakami Asao
Hideya Murai
Woods Kentaro
Masayuki Mizuno
Takko Masaki
Kikuchi 克
Koichiro Noguchi
Koichi Nose
Application Number:
JP2009060757W
Publication Date:
November 17, 2011
Filing Date:
June 12, 2009
Export Citation:
Assignee:
NEC Corp.
International Classes:
G01R31/302; H01L21/66
Attorney, Agent or Firm:
Akio Miyazaki
Masayuki Ishibashi
Masaaki Ogata
Masayuki Ishibashi
Masaaki Ogata