Title:
FILM-FORMING APPARATUS AND POWDER EVAPORATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/007981
Kind Code:
A1
Abstract:
A raw material powder is supplied from a raw material storage unit, in which the raw material powder in a solid state is stored, to a powder evaporation unit together with a carrier gas; then the raw material powder is changed into a plasma in the powder evaporation unit, thereby being formed into a gaseous raw material; and then the resulting gaseous raw material is supplied to a process chamber.
Inventors:
TAMURA AKITAKE (JP)
DOBASHI KAZUYA (JP)
HAYASHI TERUYUKI (JP)
DOBASHI KAZUYA (JP)
HAYASHI TERUYUKI (JP)
Application Number:
PCT/JP2009/062717
Publication Date:
January 21, 2010
Filing Date:
July 14, 2009
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
TAMURA AKITAKE (JP)
DOBASHI KAZUYA (JP)
HAYASHI TERUYUKI (JP)
TAMURA AKITAKE (JP)
DOBASHI KAZUYA (JP)
HAYASHI TERUYUKI (JP)
International Classes:
H01L21/31; C23C14/12; C23C14/24; C23C16/448; C23C16/452; H01L51/50; H05B33/10
Foreign References:
| JPH02240265A | 1990-09-25 | |||
| JPH07223899A | 1995-08-22 | |||
| JP2002004054A | 2002-01-09 | |||
| JP2001523768A | 2001-11-27 | |||
| JPH03287768A | 1991-12-18 |
Attorney, Agent or Firm:
YOSHITAKE Kenji et al. (JP)
Kenji Yoshitake (JP)
Kenji Yoshitake (JP)
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