Title:
流量制御装置の異常検知方法および流量監視方法
Document Type and Number:
Japanese Patent JP7111408
Kind Code:
B2
Abstract:
An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.
Inventors:
Atsushi Hidaka
Masaaki Nagase
Koji Nishino
Shinichi Ikeda
Kaoru Hirata
Masaaki Nagase
Koji Nishino
Shinichi Ikeda
Kaoru Hirata
Application Number:
JP2021562608A
Publication Date:
August 02, 2022
Filing Date:
November 26, 2020
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
G01F1/00; G01F1/42; G05D7/06
Domestic Patent References:
| JP2000214916A | ||||
| JP2015514972A | ||||
| JP2008015581A | ||||
| JP2003270010A |
Foreign References:
| WO2017110066A1 | ||||
| WO2012153455A1 | ||||
| KR1020110128427A |
Attorney, Agent or Firm:
Ryuichi Yata
Kenichi Yoshitake
Kenichi Yoshitake