Title:
セリア系微粒子分散液、その製造方法およびセリア系微粒子分散液を含む研磨用砥粒分散液
Document Type and Number:
Japanese Patent JP7038022
Kind Code:
B2
Abstract:
To provide a ceria-based composite particle dispersion liquid capable of polishing even a silica film, an Si wafer or a difficult-to-process material at high speed and attaining high surface accuracy at the same time.SOLUTION: A ceria-based fine particle dispersion is provided which comprises ceria-based fine particles having the following characteristics and an average particle diameter of 5 to 500 nm. The ceria fine particles have raw material ceria fine particles and a layer containing easily soluble silica on the surface of the raw material ceria fine particles, and the raw material ceria fine particles mainly contain crystalline ceria. The ratio of a mass D1 of the easily soluble silica contained in the layer containing the easily soluble silica to a mass D2 of the ceria-based fine particles is from 0.005 to 10%. When the ceria-based fine particles are subjected to X-ray diffraction, only a crystalline phase of ceria is detected. The ceria fine particles have an average crystallite diameter of 3 to 300 nm of the crystalline ceria measured by X-ray diffraction.SELECTED DRAWING: Figure 1
Inventors:
Toshiro Komatsu
Hiroyasu Nishida
Yuji Tawarakosa
Nakayama Kazuhiro
Hiroyasu Nishida
Yuji Tawarakosa
Nakayama Kazuhiro
Application Number:
JP2018147516A
Publication Date:
March 17, 2022
Filing Date:
August 06, 2018
Export Citation:
Assignee:
JGC Catalysts Co., Ltd.
International Classes:
C01F17/206; B24B37/00; C01F17/10; C09K3/14; H01L21/304
Domestic Patent References:
| JP2017206411A | ||||
| JP2004079968A | ||||
| JP2003206475A | ||||
| JP2018123046A | ||||
| JP2014012311A | ||||
| JP2002265931A |
Attorney, Agent or Firm:
Right Shunsuke
Takahashi politics
Takahashi politics
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