Title:
ACCURACY MEASURING APPARATUS FOR ANALOGOUSLY-SHAPED STRUCTURE
Document Type and Number:
Japanese Patent JP3047085
Kind Code:
B2
Abstract:
PURPOSE: To obtain the accuracy measuring apparatus for an analogously-shaped structure for measuring the shape of the grooves of a fin structure simply in a short time it relatively high accuracy.
CONSTITUTION: A gage 2, which has many fins at the same pitch, is provided so that the fins are intermeshed to each other with all groove parts of a fin structure to be measured 1. The errors in groove widths, the errors in groove pitch and the errors in inclinations of the grooves are collectively measured based on the amount of displacement caused by reciprocating any of the fin structure to be measured 1 or the gage 2 into the right and left directions orthogonal to the fins. The machining accuracy after the machining of the grooves of the fin structure can be measured in a short time in relatively high accuracy by the simple reciprocating operation of any of the material to be measured or the gage.
Inventors:
Takahiro Ohkuro
Shigeyuki Sasaki
Shinichi Wai
Kenji Morita
Shigeyuki Sasaki
Shinichi Wai
Kenji Morita
Application Number:
JP34681291A
Publication Date:
May 29, 2000
Filing Date:
December 27, 1991
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01B5/16; G01B21/16; H01L23/34; (IPC1-7): G01B21/16; G01B5/16
Domestic Patent References:
| JP6218607U |
Attorney, Agent or Firm:
Tatsuyuki Unuma