Title:
ACTIVE TYPE VIBRATION REMOVING DEVICE
Document Type and Number:
Japanese Patent JP3696928
Kind Code:
B2
Abstract:
PURPOSE: To effectively restrain transmission of a foundation with the use of a simple structure by using PI compensation, integral compensation or double integral compensation as compensation for feed-forward of the vibration from the foundation to an actuator.
CONSTITUTION: An active type vibration removing device is composed of a vibration feed-back group A for a vibration removing bed, which carries out vibration control in view of vibration of the vibration removing bed 1, a feed- forward group B for a floor, which carries out vibration control in view of transmission of vibration from a device installation foundation 6 to the vibration removing bed 1. In the feed-back group A, vibration of the vibration removing bed 1 which is supported by a support mechanism 2 in a vibration in a vibration-proof manner, is detected by a first vibration detecting means 4, and is then computed by a compensator 5 in order to control an electromagnetic actuator 3 such as a voice coil motor. Meanwhile in the feed-forward group B, the vibration of the device installation foundation 6 is detected by a second vibration detecting means 7, and is then computed by a compensator 8 in order to control. the electromagnetic actuator 3.
Inventors:
Takehiko Mayama
Katsumi Asada
Katsumi Asada
Application Number:
JP15414895A
Publication Date:
September 21, 2005
Filing Date:
May 30, 1995
Export Citation:
Assignee:
Canon Inc
International Classes:
F16F15/02; G03F7/20; G05D19/02; H01L21/027; (IPC1-7): F16F15/02; G05D19/02; H01L21/027
Domestic Patent References:
| JP4019438A | ||||
| JP5340444A |
Attorney, Agent or Firm:
Tetsuya Ito