ACTIVE VIBRATION REMOVAL UNIT AND SENSOR SETUP METHOD THEREOF

Title:

ACTIVE VIBRATION REMOVAL UNIT AND SENSOR SETUP METHOD THEREOF

Document Type and Number:

Japanese Patent JP3696926

Kind Code:

B2

Abstract:

PURPOSE: To capacitate it for highly accurate vibration removal by calculating both translational and rotational movements as a rigid motion of a vibro- removal base so accurately to check the effect of error factors including an observational noise or the like to the minimum.
CONSTITUTION: In this active vibration removal unit which eliminates a vibration in a vibro-removal base 4 by detecting the motion of this vibro-removal base 4 supporting equipment with plural pieces of sensors 2a, 2b and 2c, and on the basis of each detecting output of these sensors 2a to 2c, controlling three actuators 3a, 3b and 3c, respective kinenatic parameters in a motion pertaining to an XY plane of the vibro-removal base 4 are set to Px, Pv and Pθz, and each output signal of these sensors 2a to 2c is set to Sn. At this time, from the geometrical setup of these sensors 2a to 2c, these sensors are set up so as to make the conditional number of a factorial matrix A in simultaneous equations to be shown in s=Ap being materialized between a vector [Px, Py, Pθz] and another vector [s1,... Sn] come to the minimum.

Inventors:

Hiroaki Kato

Application Number:

JP14741295A

Publication Date:

September 21, 2005

Filing Date:

June 14, 1995

Export Citation:

Click for automatic bibliography generation Help