Title:
ACTUATOR DEVICE AND FLUID INJECTING HEAD
Document Type and Number:
Japanese Patent JP2008078408
Kind Code:
A
Abstract:
To provide an actuator device having improved response properties of vibration and durability, and to provide a fluid injecting head.
The actuator device has a piezoelectric element comprising a lower electrode provided at one surface side of a substrate, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer; and the lower electrode. The lower electrode has a density elasticity adjustment layer made of an alloy of Pt and TiOX (0.1x2).
Inventors:
KAMEI HIROYUKI
Application Number:
JP2006256203A
Publication Date:
April 03, 2008
Filing Date:
September 21, 2006
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/18; H01L41/187; H01L41/22; H01L41/29
Domestic Patent References:
JP2005333105A | 2005-12-02 | |||
JP2005245247A | 2005-09-15 | |||
JPH11205898A | 1999-07-30 | |||
JP2008060259A | 2008-03-13 | |||
JP2005249645A | 2005-09-15 | |||
JPH1081016A | 1998-03-31 | |||
JP2001203401A | 2001-07-27 | |||
JP2008078406A | 2008-04-03 | |||
JP2008078407A | 2008-04-03 | |||
JP2006093312A | 2006-04-06 | |||
JP2003133604A | 2003-05-09 |
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka
Muranaka
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