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Title:
ACTUATOR DEVICE AND FLUID INJECTING HEAD
Document Type and Number:
Japanese Patent JP2008078408
Kind Code:
A
Abstract:

To provide an actuator device having improved response properties of vibration and durability, and to provide a fluid injecting head.

The actuator device has a piezoelectric element comprising a lower electrode provided at one surface side of a substrate, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer; and the lower electrode. The lower electrode has a density elasticity adjustment layer made of an alloy of Pt and TiOX (0.1x2).


Inventors:
KAMEI HIROYUKI
Application Number:
JP2006256203A
Publication Date:
April 03, 2008
Filing Date:
September 21, 2006
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/145; B41J2/16; H01L41/18; H01L41/187; H01L41/22; H01L41/29
Domestic Patent References:
JP2005333105A2005-12-02
JP2005245247A2005-09-15
JPH11205898A1999-07-30
JP2008060259A2008-03-13
JP2005249645A2005-09-15
JPH1081016A1998-03-31
JP2001203401A2001-07-27
JP2008078406A2008-04-03
JP2008078407A2008-04-03
JP2006093312A2006-04-06
JP2003133604A2003-05-09
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka