Title:
ADSORPTION DEVICE AND ADSORPTION METHOD
Document Type and Number:
Japanese Patent JP2022029922
Kind Code:
A
Abstract:
To provide an adsorption device, etc., capable of easily removing a hole-filling material from an adsorbed object.SOLUTION: The present invention relates to an adsorption device 30 comprising: an adsorption pad 31 adsorbing an adsorbed surface 11 within a predetermined range including a penetration hole 13 penetrating the adsorbed surface 11 and an opposite-side surface 12 in a state where a hole-filling material 20 consisting of an elastic member is inserted into the penetration hole 13 of an adsorbed object 10 in which the penetration hole 13 is formed; and a pressure control section for controlling a pressure within a space S formed between the adsorption pad 31 and the adsorbed surface 11. The pressure control section removes the hole-filling material 20 which is inserted to the penetration hole 13, from the penetration hole 13 by pressurizing the inside of the adsorption pad in a state where the opposite-side surface 12 is pressed.SELECTED DRAWING: Figure 5
Inventors:
SEKI NAGAHITO
MATSUMOTO KOICHI
HIROSE YOSHITAKA
ENOKI AKINARI
MATSUMOTO KOICHI
HIROSE YOSHITAKA
ENOKI AKINARI
Application Number:
JP2020133530A
Publication Date:
February 18, 2022
Filing Date:
August 06, 2020
Export Citation:
Assignee:
JVC KENWOOD CORP
International Classes:
H01L21/52; B25J15/06; H05K13/02
Attorney, Agent or Firm:
Ken Ieiri
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