Title:
エアロゾル生成装置及びこれを備えた成膜装置
Document Type and Number:
Japanese Patent JP7161197
Kind Code:
B2
Abstract:
To provide an aerosol generating device that continuously and stably generates aerosol of a prescribed concentration.SOLUTION: An aerosol generating device according to one embodiment of the present invention comprises: a sealed container; a tray; at least one aerosolizing mechanism; a moving mechanism; and an oscillating mechanism. The tray is disposed inside the sealed vessel and includes a storage part for storing raw material particles. The aerosolizing mechanism has: a gas ejecting member which ejects a first gas for stirring up the raw material particles; a hood member including a space part for housing the gas ejection member and an aperture end abutting on the raw material particles inside the storage part; and a conveyance tube which conveys aerosol of the raw material particles produced inside the space part disposed in the hood member to a nozzle. The moving mechanism performs mutual relative movement of the tray and the aerosolizing mechanism inside the storage part. The oscillation mechanism oscillates the tray inside the sealed container.SELECTED DRAWING: Figure 2
Inventors:
Ebuchi Fuchida
Application Number:
JP2019031681A
Publication Date:
October 26, 2022
Filing Date:
February 25, 2019
Export Citation:
Assignee:
Fuchita Nano Engineering Co., Ltd.
International Classes:
B05C19/06; B05C19/04; C23C24/04
Domestic Patent References:
| JP2001348658A | ||||
| JP8158033A | ||||
| JP2014009368A | ||||
| JP201627185A | ||||
| JP2009179847A | ||||
| JP2013227636A |
Attorney, Agent or Firm:
Patent Business Corporation Minami Aoyama International Patent Office
Junichi Omori
Takahashi Mitsuru
Teppei Nakamura
Akira Orii
Sekine Masayoshi
Ayako Kaneko
Shintaro Kanayama
Ayako Chiba
Tomohisa Shiraka
Junichi Omori
Takahashi Mitsuru
Teppei Nakamura
Akira Orii
Sekine Masayoshi
Ayako Kaneko
Shintaro Kanayama
Ayako Chiba
Tomohisa Shiraka